Cleanroom is a core infrastructure in semiconductor production that ensures product yield and performance. Its core function is to create a local high-cleanliness environment in key production links and isolate the influence of micro-pollutants on semiconductor devices.

It directly determines the yield of semiconductor products
The critical dimensions of semiconductor chips have entered the nanometer level (such as 3nm and 2nm processes), and even tiny contaminants can cause device failure.
Control of fine particles: The clean booth can filter out dust, fibers and other particles in the air to prevent them from adhering to the surface of the wafer and causing short circuits or open circuits in the circuit.
Isolate chemical pollutants: Through air flow control and filtration systems, reduce volatile organic compounds (VOCs), metal ions and other chemical impurities to prevent wafer corrosion or performance degradation.
Stabilize environmental parameters: Precisely control temperature (typically ±0.1℃), humidity (typically ± 2%RH), and pressure to prevent wafer deformation or process parameter deviation caused by environmental fluctuations.
2. Support high-precision semiconductor processes
The core processes of semiconductor manufacturing, such as photolithography, etching, and thin film deposition, have extremely high requirements for environmental cleanliness.
Photolithography process: Photoresist is extremely sensitive to micro-particles and environmental humidity. A clean booth can ensure the precise transfer of photolithography patterns and prevent defects caused by contamination.
Thin film deposition: During the atomic-level thin film growth process, any impurities will disrupt the uniformity of the film. Clean booths can provide an undisturbed environmental foundation for the process.
3. Reduce production costs and risks
Reduce scrap rate: Clean booths directly lower the scrap of wafers caused by defects by controlling contamination, and the manufacturing cost of a single wafer can reach several thousand to tens of thousands of dollars.
Avoiding batch failures: If key process links are contaminated, it may lead to the failure of the entire batch (usually including dozens of wafers) of products. Clean booths can effectively avoid such major losses.