{"id":4609,"date":"2025-09-26T08:46:24","date_gmt":"2025-09-26T00:46:24","guid":{"rendered":"https:\/\/www.bacintl.com\/?p=4609"},"modified":"2025-10-29T11:51:10","modified_gmt":"2025-10-29T03:51:10","slug":"what-are-the-requirements-for-cleanrooms-in-the-semiconductor-industry","status":"publish","type":"post","link":"https:\/\/www.bacintl.com\/ar\/what-are-the-requirements-for-cleanrooms-in-the-semiconductor-industry\/","title":{"rendered":"\u0645\u0627 \u0647\u064a \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u063a\u0631\u0641 \u0627\u0644\u0646\u0638\u064a\u0641\u0629 \u0641\u064a \u0635\u0646\u0627\u0639\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u061f"},"content":{"rendered":"
Due to the fact that the environmental sensitivity of semiconductor processes (such as advanced 7nm and 5nm processes) increases exponentially as the process shrinks, the standards for cleanrooms are much higher than those for ordinary industrial or medical clean environments. The specific requirements can be broken down into the following six core dimensions:
\nI. \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u062c\u0633\u064a\u0645\u0627\u062a \u0627\u0644\u0647\u0648\u0627\u0621: \u062c\u0648\u0647\u0631 \u0627\u0644\u0646\u0648\u0627\u0629
\n\u0641\u064a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u060c \u062d\u062a\u0649 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0627\u0644\u062a\u064a \u064a\u0642\u0644 \u0642\u0637\u0631\u0647\u0627 \u0639\u0646 0.1 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631 (\u062d\u0648\u0627\u0644\u064a 1\/500 \u0642\u0637\u0631 \u0634\u0639\u0631\u0629 \u0627\u0644\u0625\u0646\u0633\u0627\u0646) \u0627\u0644\u0645\u0644\u062a\u0635\u0642\u0629 \u0628\u0633\u0637\u062d \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0642\u062f \u062a\u0624\u062f\u064a \u0625\u0644\u0649 \u062a\u062e\u0631\u064a\u062f \u0627\u0644\u0631\u0642\u0627\u0642\u0629. \u0644\u0630\u0644\u0643\u060c \u0641\u0625\u0646 \u062a\u0631\u0643\u064a\u0632 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0647\u0648 \u0627\u0644\u0623\u0633\u0627\u0633 \u0627\u0644\u0623\u0633\u0627\u0633\u064a \u0644\u062a\u0635\u0646\u064a\u0641 \u063a\u0631\u0641 \u0627\u0644\u0623\u0628\u062d\u0627\u062b. \u0648\u062a\u062a\u0628\u0639 \u0627\u0644\u0635\u0646\u0627\u0639\u0629 \u0639\u0645\u0648\u0645\u064b\u0627 \u0627\u0644\u0645\u0639\u064a\u0627\u0631 \u0627\u0644\u062f\u0648\u0644\u064a ISO 14644-1 (\u062a\u0635\u0646\u064a\u0641 \u0646\u0638\u0627\u0641\u0629 \u0627\u0644\u0647\u0648\u0627\u0621) \u0627\u0644\u0645\u0639\u064a\u0627\u0631 \u0627\u0644\u062f\u0648\u0644\u064a ISO 14644-1\u060c \u0648\u0644\u0643\u0646 \u0627\u0644\u0645\u0639\u0627\u064a\u064a\u0631 \u0627\u0644\u0641\u0639\u0644\u064a\u0629 \u0627\u0644\u0645\u0637\u0628\u0642\u0629 \u0641\u064a \u0635\u0646\u0627\u0639\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0639\u0627\u062f\u0629\u064b \u0645\u0627 \u062a\u0643\u0648\u0646 \u0623\u0639\u0644\u0649 \u0628\u0643\u062b\u064a\u0631 \u0645\u0646 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0639\u0627\u0645.
\n1. \u064a\u062a\u0637\u0627\u0628\u0642 \u062a\u0635\u0646\u064a\u0641 \u0627\u0644\u0646\u0638\u0627\u0641\u0629 \u0645\u0639 \u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a
\n\u062a\u0633\u062a\u062e\u062f\u0645 \u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0629 \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 ISO 14644-1 \"\u0639\u062f\u062f \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u2265 \u062d\u062c\u0645 \u062c\u0633\u064a\u0645\u0627\u062a \u0645\u062d\u062f\u062f \u0644\u0643\u0644 \u0645\u062a\u0631 \u0645\u0643\u0639\u0628 \u0645\u0646 \u0627\u0644\u0647\u0648\u0627\u0621\" \u0643\u0645\u0624\u0634\u0631 \u0644\u0644\u062a\u0635\u0646\u064a\u0641. \u062a\u0633\u062a\u062e\u062f\u0645 \u0635\u0646\u0627\u0639\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0628\u0634\u0643\u0644 \u0623\u0633\u0627\u0633\u064a \u0627\u0644\u0641\u0626\u0629 1 \u0625\u0644\u0649 \u0627\u0644\u0641\u0626\u0629 5 \u0645\u0646 \u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0629 \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 ISO (\u0628\u064a\u0646\u0645\u0627 \u063a\u0631\u0641 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0627\u0644\u0635\u0646\u0627\u0639\u064a\u0629 \u0627\u0644\u0639\u0627\u062f\u064a\u0629 \u0647\u064a \u0641\u064a \u0627\u0644\u063a\u0627\u0644\u0628 \u0645\u0646 \u0627\u0644\u0641\u0626\u0629 8 \u0625\u0644\u0649 \u0627\u0644\u0641\u0626\u0629 9)\u060c \u0648\u062a\u062a\u0648\u0627\u0641\u0642 \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u0645\u062e\u062a\u0644\u0641\u0629 \u0645\u0639 \u0645\u0633\u062a\u0648\u064a\u0627\u062a \u0645\u062e\u062a\u0644\u0641\u0629:<\/div>\n
\n\n\n\n\n\n\n
\u0641\u0626\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629 (ISO 14644-1)<\/td>\n\u062c\u0633\u064a\u0645\u0627\u062a \u0627\u0644\u062a\u062d\u0643\u0645 \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u0629 (\u062d\u062c\u0645 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a)<\/td>\n\n

\u0627\u0644\u062d\u062f \u0627\u0644\u0623\u0642\u0635\u0649 \u0644\u0639\u062f\u062f \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0644\u0643\u0644 \u0645\u062a\u0631 \u0645\u0643\u0639\u0628<\/p>\n<\/td>\n

\u0633\u064a\u0646\u0627\u0631\u064a\u0648\u0647\u0627\u062a \u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629 \u0644\u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/td>\n<\/tr>\n
\u0627\u0644\u0641\u0626\u0629 1<\/td>\n0.1 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631 \u3001 0.2 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631<\/td>\n0.1 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631: \u22641 \u0642\u0637\u0639\u0629\u061b 0.2 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631: \u22640 \u0642\u0637\u0639\u0629<\/td>\n\u0639\u0645\u0644\u064a\u0627\u062a \u0645\u062a\u0642\u062f\u0645\u0629 \u0645\u0646 5 \u0646\u0627\u0646\u0648\u0645\u062a\u0631 \u0648\u0645\u0627 \u062f\u0648\u0646 \u0630\u0644\u0643 (\u0645\u062b\u0644 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0628\u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0627\u0644\u0623\u0648\u0631\u0648-\u0636\u0648\u0626\u064a\u0629\u060c \u0648\u0631\u0628\u0637 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a)<\/td>\n<\/tr>\n
\u0627\u0644\u0641\u0626\u0629 2<\/td>\n0.1 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631 \u3001 0.2 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631<\/td>\n0.1 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631: \u22642 \u0642\u0637\u0639\u0629\u061b 0.2 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631: \u22641 \u0642\u0637\u0639\u0629<\/td>\n\u0639\u0645\u0644\u064a\u0627\u062a \u0645\u0646 7-14 \u0646\u0627\u0646\u0648\u0645\u062a\u0631 (\u0645\u062b\u0644 \u0627\u0644\u062d\u0641\u0631 \u0648\u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0631\u0642\u064a\u0642)<\/td>\n<\/tr>\n
\u0627\u0644\u0641\u0626\u0629 5<\/td>\n0.1 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631 \u3001 0.5 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631<\/td>\n0.1 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631: \u2264 1000 \u0642\u0637\u0639\u0629\u061b 0.5 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631: \u2264 29 \u0642\u0637\u0639\u0629<\/td>\n\u0639\u0645\u0644\u064a\u0627\u062a \u0646\u0627\u0636\u062c\u0629 \u0645\u0646 28 \u0646\u0627\u0646\u0648\u0645\u062a\u0631 \u0648\u0645\u0627 \u0641\u0648\u0642 (\u0645\u062b\u0644 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0648\u0627\u0644\u0627\u0646\u062a\u0634\u0627\u0631)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\u00a0<\/div>\n
\"\"<\/div>\n
\u00a0<\/div>\n
2. \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0645\u0635\u062f\u0631 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a
\n\u0627\u0644\u0623\u0641\u0631\u0627\u062f \u0647\u0645 \u0623\u0643\u0628\u0631 \u0645\u0635\u062f\u0631 \u0644\u0644\u062c\u0633\u064a\u0645\u0627\u062a (\u0643\u0644 \u0634\u062e\u0635 \u064a\u0648\u0644\u062f 1-10 \u0645\u0644\u064a\u0648\u0646 \u062c\u0633\u064a\u0645 \u0641\u064a \u0627\u0644\u062f\u0642\u064a\u0642\u0629). \u064a\u062c\u0628 \u0639\u0644\u064a\u0647\u0645 \u0627\u0631\u062a\u062f\u0627\u0621 \u0628\u062f\u0644\u0627\u062a \u0648\u0623\u0642\u0646\u0639\u0629 \u0648\u0642\u0641\u0627\u0632\u0627\u062a \u0648\u0623\u062d\u0630\u064a\u0629 \u062e\u0627\u0644\u064a\u0629 \u0645\u0646 \u0627\u0644\u063a\u0628\u0627\u0631. \u0642\u0628\u0644 \u062f\u062e\u0648\u0644 \u0627\u0644\u063a\u0631\u0641\u0629 \u0627\u0644\u0646\u0638\u064a\u0641\u0629\u060c \u064a\u0645\u0631\u0648\u0646 \u0645\u0646 \u062e\u0644\u0627\u0644 \u062f\u0634 \u0647\u0648\u0627\u0626\u064a (\u062a\u062f\u0641\u0642 \u0647\u0648\u0627\u0621 \u0639\u0627\u0644\u064a \u0627\u0644\u0636\u063a\u0637 \u0644\u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a) \u0648\u063a\u0631\u0641\u0629 \u0642\u0641\u0644 \u0627\u0644\u0647\u0648\u0627\u0621 (\u0644\u0645\u0648\u0627\u0632\u0646\u0629 \u0627\u0644\u0636\u063a\u0637 \u0648\u062d\u062c\u0628 \u0627\u0644\u0647\u0648\u0627\u0621 \u0627\u0644\u062e\u0627\u0631\u062c\u064a).
\n\u064a\u062c\u0628 \u0623\u0646 \u062a\u062d\u062a\u0648\u064a \u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0625\u0646\u062a\u0627\u062c (\u0645\u062b\u0644 \u0645\u0627\u0643\u064a\u0646\u0627\u062a \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0644\u064a\u062b\u0648\u063a\u0631\u0627\u0641\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0648\u0627\u0644\u062d\u0641\u0631) \u0639\u0644\u0649 \u0648\u062d\u062f\u0629 \u062a\u0646\u0638\u064a\u0641 \u0645\u062d\u0644\u064a\u0629 \u0644\u0627\u062d\u062a\u0648\u0627\u0621 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0623\u062b\u0646\u0627\u0621 \u0627\u0644\u062a\u0634\u063a\u064a\u0644. \u0625\u063a\u0644\u0627\u0642 \u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0628\u0627\u0644\u0623\u0631\u0636\u064a\u0629 \u0648\u0627\u0644\u062c\u062f\u0631\u0627\u0646 \u0644\u0645\u0646\u0639 \u062a\u0631\u0627\u0643\u0645 \u0627\u0644\u063a\u0628\u0627\u0631.
\n\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0645\u0648\u0627\u062f: \u064a\u062c\u0628 \u0623\u0646 \u062a\u062f\u062e\u0644 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0648\u0645\u0642\u0627\u0648\u0645\u0627\u062a \u0627\u0644\u0636\u0648\u0621 \u0648\u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0623\u062e\u0631\u0649 \u0625\u0644\u0649 \u0627\u0644\u063a\u0631\u0641\u0629 \u0627\u0644\u0646\u0638\u064a\u0641\u0629 \u0645\u0646 \u062e\u0644\u0627\u0644 \"\u0646\u0627\u0641\u0630\u0629 \u0646\u0642\u0644 \u062e\u0627\u0644\u064a\u0629 \u0645\u0646 \u0627\u0644\u063a\u0628\u0627\u0631\" (\u0645\u0639 \u0627\u0644\u062a\u0637\u0647\u064a\u0631 \u0628\u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0648\u062a\u0646\u0642\u064a\u0629 \u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0621)\u060c \u0648\u064a\u062c\u0628 \u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0639\u0628\u0648\u0629 \u0627\u0644\u062e\u0627\u0631\u062c\u064a\u0629 \u0648\u062a\u0646\u0638\u064a\u0641\u0647\u0627 \u062e\u0627\u0631\u062c \u0627\u0644\u063a\u0631\u0641\u0629 \u0627\u0644\u0646\u0638\u064a\u0641\u0629. \u064a\u062c\u0628 \u0623\u0646 \u062a\u0643\u0648\u0646 \u0639\u0631\u0628\u0629 \u0646\u0642\u0644 \u0627\u0644\u0645\u0648\u0627\u062f \u0645\u0632\u0648\u062f\u0629 \u0628\u0645\u062d\u0631\u0643 \u0628\u062f\u0648\u0646 \u0641\u0631\u0634 (\u0644\u0645\u0646\u0639 \u0633\u0642\u0648\u0637 \u0645\u0633\u062d\u0648\u0642 \u0627\u0644\u0643\u0631\u0628\u0648\u0646)\u060c \u0648\u064a\u062c\u0628 \u0623\u0646 \u062a\u0643\u0648\u0646 \u0627\u0644\u0639\u062c\u0644\u0627\u062a \u0645\u0635\u0646\u0648\u0639\u0629 \u0645\u0646 \u0645\u0648\u0627\u062f \u0645\u0636\u0627\u062f\u0629 \u0644\u0644\u0643\u0647\u0631\u0628\u0627\u0621 \u0627\u0644\u0633\u0627\u0643\u0646\u0629 \u0648\u062e\u0627\u0644\u064a\u0629 \u0645\u0646 \u0627\u0644\u063a\u0628\u0627\u0631.
\nII. \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0648\u0627\u0644\u0631\u0637\u0648\u0628\u0629: \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u062f\u0642\u0629 \u0639\u0644\u0649 \u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0645\u064a\u0643\u0631\u0648\u0646
\n\u0625\u0646 \u0639\u0645\u0644\u064a\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u060c \u0645\u062b\u0644 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0644\u064a\u062b\u0648\u063a\u0631\u0627\u0641\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0648\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0631\u0642\u064a\u0642\u0629\u060c \u062d\u0633\u0627\u0633\u0629 \u0644\u0644\u063a\u0627\u064a\u0629 \u0644\u062a\u063a\u064a\u0631\u0627\u062a \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0648\u0627\u0644\u0631\u0637\u0648\u0628\u0629. \u064a\u0645\u0643\u0646 \u0623\u0646 \u062a\u062a\u0633\u0628\u0628 \u0627\u0644\u062a\u0642\u0644\u0628\u0627\u062a \u0641\u064a \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0641\u064a \u062a\u0645\u062f\u062f \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0623\u0648 \u0627\u0646\u0643\u0645\u0627\u0634\u0647\u0627\u060c \u0645\u0645\u0627 \u064a\u0624\u062b\u0631 \u0639\u0644\u0649 \u0627\u0644\u0645\u062d\u0627\u0630\u0627\u0629 (\u0639\u0644\u0649 \u0633\u0628\u064a\u0644 \u0627\u0644\u0645\u062b\u0627\u0644\u060c \u064a\u0624\u062f\u064a \u0627\u0644\u062a\u063a\u064a\u0631 \u0628\u0645\u0642\u062f\u0627\u0631 1 \u2103 \u0625\u0644\u0649 \u0627\u0646\u062d\u0631\u0627\u0641 \u0628\u0645\u0642\u062f\u0627\u0631 0.1 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631). \u064a\u0645\u0643\u0646 \u0623\u0646 \u062a\u0624\u062b\u0631 \u062a\u063a\u064a\u0631\u0627\u062a \u0627\u0644\u0631\u0637\u0648\u0628\u0629 \u0639\u0644\u0649 \u0645\u0642\u0627\u0648\u0645 \u0627\u0644\u0636\u0648\u0621 \u0623\u0648 \u0627\u0644\u062a\u0635\u0627\u0642 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u0645\u0639\u062f\u0646\u064a\u0629 \u0648\u062a\u0633\u0628\u0628 \u062a\u0631\u0627\u0643\u0645 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0621 \u0627\u0644\u0633\u0627\u0643\u0646\u0629.
\n1. \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629
\n\u0646\u0637\u0627\u0642 \u0627\u0644\u062a\u062d\u0643\u0645: \u0628\u0634\u0643\u0644 \u0639\u0627\u0645\u060c \u064a\u062c\u0628 \u0623\u0646 \u064a\u0643\u0648\u0646 \u00b1 23 \u2103 \u00b1 0.1 \u2103 \u0625\u0644\u0649 \u00b1 0.5 \u2103 (\u00b1 0.1 \u2103 \u0644\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629\u060c \u0648\u00b1 0.5 \u2103 \u0644\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u0646\u0627\u0636\u062c\u0629)\u060c \u0648\u064a\u062c\u0628 \u0623\u0646 \u064a\u0643\u0648\u0646 \u0627\u0644\u0641\u0631\u0642 \u0641\u064a \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0628\u064a\u0646 \u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u0645\u062e\u062a\u0644\u0641\u0629 \u0641\u064a \u0627\u0644\u063a\u0631\u0641\u0629 \u0627\u0644\u0646\u0638\u064a\u0641\u0629 (\u0645\u062b\u0644 \u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0644\u064a\u062b\u0648\u063a\u0631\u0627\u0641\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0648\u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u062d\u0641\u0631) \u22640.3 \u2103.
\n\u0648\u0636\u0639 \u0627\u0644\u062a\u062d\u0643\u0645: \u062a\u0645 \u0627\u0639\u062a\u0645\u0627\u062f \"\u0646\u0638\u0627\u0645 \u062a\u0643\u064a\u064a\u0641 \u0627\u0644\u0647\u0648\u0627\u0621 \u0628\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0648\u0631\u0637\u0648\u0628\u0629 \u062b\u0627\u0628\u062a\u0629 (MAU+AHU)\". \u064a\u062a\u0645 \u0645\u0631\u0627\u0642\u0628\u0629 \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0641\u064a \u0627\u0644\u0648\u0642\u062a \u0627\u0644\u062d\u0642\u064a\u0642\u064a \u0645\u0646 \u062e\u0644\u0627\u0644 \u0623\u062c\u0647\u0632\u0629 \u0627\u0633\u062a\u0634\u0639\u0627\u0631 \u062f\u0642\u064a\u0642\u0629\u060c \u0648\u064a\u062a\u0645 \u062a\u0646\u0638\u064a\u0645\u0647\u0627 \u0645\u0639 \u0645\u0631\u0627\u0648\u062d \u0645\u062a\u063a\u064a\u0631\u0629 \u0627\u0644\u062a\u0631\u062f\u062f \u0648\u0645\u0644\u0641\u0627\u062a \u0627\u0644\u062a\u062f\u0641\u0626\u0629 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629\/\u0645\u0644\u0641\u0627\u062a \u0627\u0644\u0645\u0627\u0621 \u0627\u0644\u0628\u0627\u0631\u062f \u0644\u0636\u0645\u0627\u0646 \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u062a\u062f\u0641\u0642 \u0647\u0648\u0627\u0621 \u0645\u0648\u062d\u062f\u0629 (\u062a\u062c\u0646\u0628 \u0627\u0644\u0646\u0642\u0627\u0637 \u0627\u0644\u0633\u0627\u062e\u0646\u0629 \u0627\u0644\u0645\u062d\u0644\u064a\u0629).
\n2. \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0631\u0637\u0648\u0628\u0629
\n\u0646\u0637\u0627\u0642 \u0627\u0644\u062a\u062d\u0643\u0645: \u0628\u0634\u0643\u0644 \u0639\u0627\u0645\u060c \u064a\u0644\u0632\u0645 \u0648\u062c\u0648\u062f \u0631\u0637\u0648\u0628\u0629 \u0646\u0633\u0628\u064a\u0629 (RH) \u062a\u0628\u0644\u063a 45% \u00b1 5% (\u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0628\u0639\u0636 \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a\u060c \u0645\u062b\u0644 \u062a\u0645\u0639\u062f\u0646 \u0627\u0644\u0623\u0644\u0648\u0645\u0646\u064a\u0648\u0645\u060c \u064a\u0644\u0632\u0645 \u0648\u062c\u0648\u062f \u0631\u0637\u0648\u0628\u0629 \u0646\u0633\u0628\u064a\u0629 (RH\u226430%) \u0644\u0645\u0646\u0639 \u0623\u0643\u0633\u062f\u0629 \u0627\u0644\u0623\u0644\u0648\u0645\u0646\u064a\u0648\u0645\u061b \u0648\u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0644\u064a\u062b\u0648\u063a\u0631\u0627\u0641\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629\u060c \u064a\u0644\u0632\u0645 \u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u0627\u0644\u0631\u0637\u0648\u0628\u0629 \u0627\u0644\u0646\u0633\u0628\u064a\u0629 \u0644\u062a\u062c\u0646\u0628 \u0627\u0645\u062a\u0635\u0627\u0635 \u0627\u0644\u0631\u0637\u0648\u0628\u0629 \u0644\u0645\u0642\u0627\u0648\u0645 \u0627\u0644\u0636\u0648\u0621).
\n\u0637\u0631\u064a\u0642\u0629 \u0627\u0644\u062a\u062d\u0643\u0645: \u062a\u0642\u0644\u064a\u0644 \u0627\u0644\u0631\u0637\u0648\u0628\u0629 \u0645\u0646 \u062e\u0644\u0627\u0644 \u0645\u0632\u064a\u0644 \u0627\u0644\u0631\u0637\u0648\u0628\u0629 (\u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0631\u0637\u0648\u0628\u0629 \u0627\u0644\u062f\u0648\u0627\u0631\u0629 \u0623\u0648 \u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0631\u0637\u0648\u0628\u0629 \u0628\u0627\u0644\u062a\u0628\u0631\u064a\u062f)\u060c \u0623\u0648 \u0636\u0628\u0637 \u0627\u0644\u0631\u0637\u0648\u0628\u0629 \u0645\u0646 \u062e\u0644\u0627\u0644 \u0627\u0644\u062a\u0631\u0637\u064a\u0628 \u0628\u0627\u0644\u0628\u062e\u0627\u0631 (\u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0627\u0644\u0645\u064a\u0627\u0647 \u0627\u0644\u0646\u0642\u064a\u0629 \u0644\u062a\u062c\u0646\u0628 \u062f\u062e\u0648\u0644 \u0627\u0644\u0634\u0648\u0627\u0626\u0628 \u0641\u064a \u0627\u0644\u0645\u0627\u0621 \u0645\u0646 \u0627\u0644\u0647\u0648\u0627\u0621)\u060c \u0645\u0639 \u0627\u0644\u062a\u0623\u0643\u062f \u0645\u0646 \u0623\u0646 \u062a\u0630\u0628\u0630\u0628 \u0627\u0644\u0631\u0637\u0648\u0628\u0629 \u22642% \u0641\u064a \u0627\u0644\u0633\u0627\u0639\u0629.
\n\u062b\u0627\u0644\u062b\u0627\u064b \u062a\u0646\u0638\u064a\u0645 \u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0621: \u0627\u0644\u062a\u062f\u0641\u0642 \u0623\u062d\u0627\u062f\u064a \u0627\u0644\u0627\u062a\u062c\u0627\u0647 \u0647\u0648 \u0627\u0644\u0633\u0627\u0626\u062f \u0644\u062a\u062c\u0646\u0628 \u0627\u0644\u0632\u0648\u0627\u064a\u0627 \u0627\u0644\u0645\u064a\u062a\u0629
\n\u064a\u062c\u0628 \u0623\u0646 \u064a\u0636\u0645\u0646 \u062a\u0635\u0645\u064a\u0645 \u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0621 \u0641\u064a \u063a\u0631\u0641\u0629 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \"\u062a\u0641\u0631\u064a\u063a \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0628\u0627\u0633\u062a\u0645\u0631\u0627\u0631 \u0648\u0639\u062f\u0645 \u0628\u0642\u0627\u0626\u0647\u0627 \u0623\u0648 \u062f\u0648\u0631\u0627\u0646\u0647\u0627 \u0641\u0648\u0642 \u0627\u0644\u0631\u0642\u0627\u0626\u0642\". \u0648\u0627\u0644\u0648\u0636\u0639 \u0627\u0644\u0623\u0633\u0627\u0633\u064a \u0647\u0648 \u0627\u0644\u062a\u062f\u0641\u0642 \u0627\u0644\u0631\u0623\u0633\u064a \u0623\u062d\u0627\u062f\u064a \u0627\u0644\u0627\u062a\u062c\u0627\u0647 (\u0627\u0644\u062a\u062f\u0641\u0642 \u0627\u0644\u0635\u0641\u062d\u064a)\u060c \u0628\u064a\u0646\u0645\u0627 \u062a\u0639\u062a\u0645\u062f \u0628\u0639\u0636 \u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u0645\u0633\u0627\u0639\u062f\u0629 \"\u0627\u0644\u062a\u062f\u0641\u0642 \u0627\u0644\u0623\u0641\u0642\u064a \u0623\u062d\u0627\u062f\u064a \u0627\u0644\u0627\u062a\u062c\u0627\u0647\" \u0623\u0648 \"\u0627\u0644\u062a\u062f\u0641\u0642 \u063a\u064a\u0631 \u0623\u062d\u0627\u062f\u064a \u0627\u0644\u0627\u062a\u062c\u0627\u0647 (\u0627\u0644\u062a\u062f\u0641\u0642 \u0627\u0644\u0645\u0636\u0637\u0631\u0628)\".
\n\u0627\u0644\u062a\u062f\u0641\u0642 \u0627\u0644\u0639\u0645\u0648\u062f\u064a \u0623\u062d\u0627\u062f\u064a \u0627\u0644\u0627\u062a\u062c\u0627\u0647 (\u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u0629)
\n\u0627\u0644\u0645\u0628\u062f\u0623 \u062a\u0645 \u062a\u062c\u0647\u064a\u0632 \u0633\u0642\u0641 \u063a\u0631\u0641\u0629 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0628 \"\u0645\u0631\u0634\u062d\u0627\u062a \u0647\u0648\u0627\u0621 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0643\u0641\u0627\u0621\u0629 (HEPA)\" \u0623\u0648 \"\u0645\u0631\u0634\u062d\u0627\u062a \u0647\u0648\u0627\u0621 \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u0643\u0641\u0627\u0621\u0629 (ULPA)\". \u0628\u0639\u062f \u0627\u0644\u0645\u0631\u0648\u0631 \u0639\u0628\u0631 \u0627\u0644\u0645\u0631\u0634\u062d\u0627\u062a\u060c \u064a\u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0621 \u0639\u0645\u0648\u062f\u064a\u064b\u0627 \u0625\u0644\u0649 \u0623\u0633\u0641\u0644 \u0628\u0633\u0631\u0639\u0629 \u0645\u0646\u062a\u0638\u0645\u0629 \u062a\u062a\u0631\u0627\u0648\u062d \u0628\u064a\u0646 0.2 \u06480.5 \u0645\u062a\u0631\/\u062b\u0627\u0646\u064a\u0629 (\u0639\u0644\u0649 \u063a\u0631\u0627\u0631 \"\u0634\u0644\u0627\u0644 \u0627\u0644\u0647\u0648\u0627\u0621\")\u060c \u0645\u0645\u0627 \u064a\u062f\u0641\u0639 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0646\u062d\u0648 \u0627\u0644\u0623\u0631\u0636 \u062b\u0645 \u062a\u0641\u0631\u064a\u063a\u0647\u0627 \u0645\u0646 \u062e\u0644\u0627\u0644 \u0641\u062a\u062d\u0627\u062a \u0627\u0644\u0647\u0648\u0627\u0621 \u0627\u0644\u0645\u0631\u062a\u062f \u0639\u0644\u0649 \u0627\u0644\u0623\u0631\u0636. \u062a\u0634\u0643\u064a\u0644 \"\u0642\u0646\u0627\u0629 \u062a\u062f\u0641\u0642 \u0647\u0648\u0627\u0621 \u0623\u062d\u0627\u062f\u064a\u0629 \u0627\u0644\u0627\u062a\u062c\u0627\u0647 \u0645\u0646 \u0623\u0639\u0644\u0649 \u0625\u0644\u0649 \u0623\u0633\u0641\u0644\".
\n\u064a\u062c\u0628 \u0623\u0646 \u064a\u0643\u0648\u0646 \u0627\u0646\u062a\u0638\u0627\u0645 \u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0621 \u226590% (\u0623\u064a \u064a\u062c\u0628 \u0623\u0646 \u064a\u0643\u0648\u0646 \u0627\u0644\u0641\u0631\u0642 \u0641\u064a \u0633\u0631\u0639\u0629 \u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0621 \u0628\u064a\u0646 \u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u0645\u062e\u062a\u0644\u0641\u0629 \u226410%)\u060c \u0648\u064a\u062c\u0628 \u062a\u062c\u0646\u0628 \"\u062f\u0648\u0627\u0645\u0627\u062a \u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0621\" (\u0627\u0644\u062a\u064a \u0642\u062f \u062a\u0633\u0628\u0628 \u0627\u062d\u062a\u0628\u0627\u0633 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a). \u064a\u062c\u0628 \u0623\u0646 \u064a\u0643\u0648\u0646 \u0645\u0639\u062f\u0644 \u062a\u063a\u0637\u064a\u0629 \u0627\u0644\u0645\u0631\u0634\u062d \u226590% (100% \u062a\u063a\u0637\u064a\u0629 \u0643\u0627\u0645\u0644\u0629 \u0644\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629)\u060c \u0648\u064a\u062c\u0628 \u0641\u062d\u0635 \u0627\u0644\u0645\u0631\u0634\u062d\u0627\u062a \u0628\u0627\u0646\u062a\u0638\u0627\u0645 (\u0645\u062b\u0644 \u0627\u062e\u062a\u0628\u0627\u0631\u0627\u062a \u0627\u0644\u0633\u0644\u0627\u0645\u0629) \u0644\u0645\u0646\u0639 \u0627\u0644\u062a\u0633\u0631\u0628.
\n2. \u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u0625\u0636\u0627\u0641\u064a\u0629 (\u0645\u062b\u0644 \u0645\u0646\u0627\u0637\u0642 \u062a\u063a\u064a\u064a\u0631 \u0627\u0644\u0645\u0644\u0627\u0628\u0633 \u0648\u0645\u0646\u0627\u0637\u0642 \u062a\u062e\u0632\u064a\u0646 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u0624\u0642\u062a\u0629)
\n\u064a\u062a\u0645 \u0627\u0639\u062a\u0645\u0627\u062f \"\u0627\u0644\u062a\u062f\u0641\u0642 \u063a\u064a\u0631 \u0623\u062d\u0627\u062f\u064a \u0627\u0644\u0627\u062a\u062c\u0627\u0647\"\u060c \u0648\u064a\u062a\u0645 \u062a\u0646\u0642\u064a\u0629 \u0627\u0644\u0647\u0648\u0627\u0621 \u0645\u0646 \u062e\u0644\u0627\u0644 \u0645\u0631\u0634\u062d\u0627\u062a HEPA \u0627\u0644\u0645\u062b\u0628\u062a\u0629 \u0639\u0644\u0649 \u0627\u0644\u062d\u0627\u0626\u0637 \u0623\u0648 \u0627\u0644\u0645\u0631\u0634\u062d\u0627\u062a \u0627\u0644\u0645\u062b\u0628\u062a\u0629 \u0641\u064a \u0627\u0644\u0633\u0642\u0641. \u064a\u062a\u0645 \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u062a\u0631\u0643\u064a\u0632 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0641\u064a \u0627\u0644\u0641\u0626\u0629 6 \u0625\u0644\u0649 \u0627\u0644\u0641\u0626\u0629 7 \u0645\u0646 ISO\u060c \u0648\u0627\u0644\u062a\u064a \u064a\u0645\u0643\u0646 \u0623\u0646 \u062a\u0644\u0628\u064a \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u062a\u0634\u063a\u064a\u0644 \u0627\u0644\u0623\u0641\u0631\u0627\u062f \u0648\u0627\u0646\u062a\u0642\u0627\u0644 \u0627\u0644\u0645\u0648\u0627\u062f.
\nIv. \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0636\u063a\u0637: \u0645\u0646\u0639 \u0627\u0644\u062a\u0644\u0648\u062b \u0627\u0644\u062e\u0627\u0631\u062c\u064a \u0645\u0646 \u0627\u0644\u062f\u062e\u0648\u0644
\n\u064a\u062c\u0628 \u0623\u0646 \u062a\u062d\u0627\u0641\u0638 \u063a\u0631\u0641\u0629 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0639\u0644\u0649 \u0636\u063a\u0637 \u0625\u064a\u062c\u0627\u0628\u064a (\u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0644\u0628\u064a\u0626\u0629 \u0627\u0644\u062e\u0627\u0631\u062c\u064a\u0629) \u0644\u0645\u0646\u0639 \u0627\u0644\u0647\u0648\u0627\u0621 \u063a\u064a\u0631 \u0627\u0644\u0646\u0638\u064a\u0641 \u0645\u0646 \u0627\u0644\u062e\u0627\u0631\u062c \u0645\u0646 \u0627\u0644\u062a\u0633\u0631\u0628 \u0625\u0644\u0649 \u0627\u0644\u062f\u0627\u062e\u0644 \u0645\u0646 \u062e\u0644\u0627\u0644 \u0627\u0644\u0641\u062c\u0648\u0627\u062a \u0645\u062b\u0644 \u0641\u062c\u0648\u0627\u062a \u0627\u0644\u0623\u0628\u0648\u0627\u0628 \u0648\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0623\u0646\u0627\u0628\u064a\u0628. \u0648\u0641\u064a \u0627\u0644\u0648\u0642\u062a \u0646\u0641\u0633\u0647\u060c \u062a\u062d\u062a\u0627\u062c \u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0630\u0627\u062a \u0645\u0633\u062a\u0648\u064a\u0627\u062a \u0627\u0644\u0646\u0638\u0627\u0641\u0629 \u0627\u0644\u0645\u062e\u062a\u0644\u0641\u0629 \u0625\u0644\u0649 \u0627\u0644\u062d\u0641\u0627\u0638 \u0639\u0644\u0649 \"\u062a\u062f\u0631\u062c \u0627\u0644\u0636\u063a\u0637\" \u0644\u0636\u0645\u0627\u0646 \u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0621 \u0645\u0646 \u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 (\u0645\u062b\u0644 \u0627\u0644\u0641\u0626\u0629 1) \u0625\u0644\u0649 \u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629 \u0627\u0644\u0645\u0646\u062e\u0641\u0636\u0629 (\u0645\u062b\u0644 \u0627\u0644\u0641\u0626\u0629 5)\u060c \u0645\u0645\u0627 \u064a\u0645\u0646\u0639 \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a \u0645\u0646 \u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629 \u0627\u0644\u0645\u0646\u062e\u0641\u0636\u0629 \u0645\u0646 \u0627\u0644\u0627\u0646\u062a\u0634\u0627\u0631 \u0625\u0644\u0649 \u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629.
\n1. \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0641\u0631\u0642 \u0627\u0644\u0636\u063a\u0637
\n\u0627\u0644\u0636\u063a\u0637 \u0627\u0644\u0645\u0648\u062c\u0628 \u0628\u064a\u0646 \u063a\u0631\u0641\u0629 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0648\u0627\u0644\u063a\u0644\u0627\u0641 \u0627\u0644\u062c\u0648\u064a \u0627\u0644\u062e\u0627\u0631\u062c\u064a: \u226515 \u0628\u0627\u0633\u0643\u0627\u0644 (\u062d\u0648\u0627\u0644\u064a 0.06 \u0628\u0648\u0635\u0629 \u0645\u0646 \u0639\u0645\u0648\u062f \u0627\u0644\u0645\u0627\u0621);
\n\u0627\u0644\u0636\u063a\u0637 \u0627\u0644\u0645\u0648\u062c\u0628 \u0628\u064a\u0646 \u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 (\u0645\u062b\u0644 \u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629) \u0648\u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629 \u0627\u0644\u0645\u0646\u062e\u0641\u0636\u0629 \u0627\u0644\u0645\u062c\u0627\u0648\u0631\u0629 (\u0645\u062b\u0644 \u0627\u0644\u0645\u0645\u0631): \u22655 \u0625\u0644\u0649 10Pa;
\n\u064a\u062c\u0628 \u0623\u0646 \u062a\u062d\u0627\u0641\u0638 \u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u062e\u0627\u0635\u0629 (\u0645\u062b\u0644 \u063a\u0631\u0641\u0629 \u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0646\u0641\u0627\u064a\u0627\u062a \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a\u0629 \u0627\u0644\u0633\u0627\u0626\u0644\u0629 \u0648\u063a\u0631\u0641\u0629 \u062a\u062e\u0632\u064a\u0646 \u0645\u0642\u0627\u0648\u0645 \u0627\u0644\u0636\u0648\u0621) \u0639\u0644\u0649 \u0636\u063a\u0637 \u0633\u0627\u0644\u0628 (\u2264-5 \u0628\u0627\u0633\u0643\u0627\u0644) \u0644\u0645\u0646\u0639 \u0627\u0646\u062a\u0634\u0627\u0631 \u0627\u0644\u063a\u0627\u0632\u0627\u062a \u0627\u0644\u0636\u0627\u0631\u0629 \u0623\u0648 \u0627\u0644\u0645\u0631\u0643\u0628\u0627\u062a \u0627\u0644\u0639\u0636\u0648\u064a\u0629 \u0627\u0644\u0645\u062a\u0637\u0627\u064a\u0631\u0629 (VOCs) \u0641\u064a \u0645\u0646\u0637\u0642\u0629 \u0627\u0644\u0625\u0646\u062a\u0627\u062c.
\n2. \u0648\u0636\u0639 \u0627\u0644\u062a\u062d\u0643\u0645
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The semiconductor industry has extremely strict requirements for cleanrooms. The core objective is to control key parameters, including particles, temperature, humidity, airflow, pressure, and chemical contaminants, in order to prevent chip manufacturing defects (such as short circuits and decreased photolithography accuracy) caused by tiny impurities or environmental fluctuations.<\/p>","protected":false},"author":3,"featured_media":4610,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[92],"tags":[],"class_list":["post-4609","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-technology"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.bacintl.com\/ar\/wp-json\/wp\/v2\/posts\/4609","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.bacintl.com\/ar\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bacintl.com\/ar\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bacintl.com\/ar\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bacintl.com\/ar\/wp-json\/wp\/v2\/comments?post=4609"}],"version-history":[{"count":4,"href":"https:\/\/www.bacintl.com\/ar\/wp-json\/wp\/v2\/posts\/4609\/revisions"}],"predecessor-version":[{"id":4631,"href":"https:\/\/www.bacintl.com\/ar\/wp-json\/wp\/v2\/posts\/4609\/revisions\/4631"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bacintl.com\/ar\/wp-json\/wp\/v2\/media\/4610"}],"wp:attachment":[{"href":"https:\/\/www.bacintl.com\/ar\/wp-json\/wp\/v2\/media?parent=4609"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bacintl.com\/ar\/wp-json\/wp\/v2\/categories?post=4609"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bacintl.com\/ar\/wp-json\/wp\/v2\/tags?post=4609"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}